Entry Personal Name

Number of records used in: 1

001 - CONTROL NUMBER

• control field: 15158

003 - CONTROL NUMBER IDENTIFIER

• control field: SUN

005 - DATE AND TIME OF LATEST TRANSACTION

• control field: 20181002160909.0

008 - FIXED-LENGTH DATA ELEMENTS

• fixed length control field: 181002|| aca||aabn | a|a d

040 ## - CATALOGING SOURCE

• Original cataloging agency: SUN
• Transcribing agency: SUN

100 ## - HEADING--PERSONAL NAME

• Personal name: Campbell, Stephen A.,
• Dates associated with a name: 1954-

670 ## - SOURCE DATA FOUND

• Source citation: Work cat.: (SUN)0: Campbell, Stephen A., 1954-, The science and engineering of microelectronic fabrication /, 1996.