Entry Topical Term

Number of records used in: 1

001 - CONTROL NUMBER

• control field: 15160

003 - CONTROL NUMBER IDENTIFIER

• control field: SUN

005 - DATE AND TIME OF LATEST TRANSACTION

• control field: 20181002160910.0

008 - FIXED-LENGTH DATA ELEMENTS

• fixed length control field: 181002|| aca||aabn | a|a d

040 ## - CATALOGING SOURCE

• Original cataloging agency: SUN
• Transcribing agency: SUN

150 ## - HEADING--TOPICAL TERM

• Topical term or geographic name entry element: Semiconductors
• General subdivision: Design and construction.

670 ## - SOURCE DATA FOUND

• Source citation: Work cat.: (SUN)0: Campbell, Stephen A., 1954- 15158, The science and engineering of microelectronic fabrication /, 1996.