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Materials, integration and technology for monolithic instruments / symposium held March 29-30, 2005, San Francisco, California, USA / editors: Jeremy A. Theil ... [et al.].
Material type:
TextSeries: Materials Research Society symposia proceedings ; v. 869Publication details: Warrendale, Pa. : Materials Research Society, 2005.Description: ix, 171 p. : ill. ; 24 cmISBN: - 1558998233
- Semiconductors -- Design and construction -- Congresses
- Integrated circuits -- Ultra large scale integration -- Design and construction -- Congresses
- Integrated circuits -- Ultra large scale integration -- Materials -- Congresses
- Thin films -- Congresses
- Metallic films -- Congresses
- Metallizing -- Congresses
- 621.38152/ 22 THE
- TK7871.85 .M367815 2005
| Item type | Current library | Collection | Call number | Status | Date due | Barcode |
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| Books | SUN - Main Library General Shelves | Text Books | 621.38152/ THE (Browse shelf(Opens below)) | Available | 2018-5158 |
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| 621.3815/ TOK Digital electronics / | 621.38152/ CAM The science and engineering of microelectronic fabrication / | 621.38152/ DEL Semi conductor | 621.38152/ THE Materials, integration and technology for monolithic instruments / | 621.381528/ PHI Motorola, Inc. ; Philips | 621.38153/ MAN Digital Logic and Compute Design | 621.381531/ SHE Microlithography : |
"... papers from Symposium D, 'Materials, Integration and Technology for Monolithic Instruments,' held March 29-30 at the 2005 MRS Spring Meeting in San Francisco, California."--Pref.
Includes bibliographical references and indexes.
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