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The science and engineering of microelectronic fabrication / Stephen A. Campbell.

By: Material type: TextTextSeries: Oxford series in electrical engineeringPublication details: New York : Oxford University Press, 1996.Description: xv, 536 p. : ill. ; 25 cmISBN:
  • 0195105087 (cl : acidfree paper)
Subject(s): DDC classification:
  • 621.38152/ 20 CAM
LOC classification:
  • TK7871.85 .C25 1996
Online resources:
List(s) this item appears in: Electrical Engineering books | Electrical Engineering
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Item type Current library Collection Call number Status Date due Barcode
Books SUN - Main Library General Shelves Text Books 621.38152/ CAM (Browse shelf(Opens below)) Available 2018-6941

Includes bibliographical references and index.

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