The science and engineering of microelectronic fabrication / Stephen A. Campbell.

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Material type: Text

TextSeries: Oxford series in electrical engineeringPublication details: New York : Oxford University Press, 1996.Description: xv, 536 p. : ill. ; 25 cmISBN:

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List(s) this item appears in: Electrical Engineering books | Electrical Engineering

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Item type	Current library	Collection	Call number	Status	Date due	Barcode
Books	SUN - Main Library General Shelves	Text Books	621.38152/ CAM (Browse shelf(Opens below))	Available		2018-6941

Includes bibliographical references and index.

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