The science and engineering of microelectronic fabrication / Stephen A. Campbell.

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TextSeries: Oxford series in electrical engineeringPublication details: New York : Oxford University Press, 1996.Description: xv, 536 p. : ill. ; 25 cmISBN:

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List(s) this item appears in: Electrical Engineering books | Electrical Engineering

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Cover image	Item type	Current library	Home library	Collection	Shelving location	Call number	Materials specified	Vol info	URL	Copy number	Status	Notes	Date due	Barcode	Item holds	Item hold queue priority	Course reserves
	Books	SUN - Main Library General Shelves		Text Books		621.38152/ CAM (Browse shelf(Opens below))					Available			2018-6941

Includes bibliographical references and index.

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