The science and engineering of microelectronic fabrication / Stephen A. Campbell.
Material type: TextSeries: Oxford series in electrical engineeringPublication details: New York : Oxford University Press, 1996.Description: xv, 536 p. : ill. ; 25 cmISBN:- 0195105087 (cl : acidfree paper)
- 621.38152/ 20 CAM
- TK7871.85 .C25 1996
Item type | Current library | Collection | Call number | Status | Date due | Barcode |
---|---|---|---|---|---|---|
Books | SUN - Main Library General Shelves | Text Books | 621.38152/ CAM (Browse shelf(Opens below)) | Available | 2018-6941 |
Includes bibliographical references and index.
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