The science and engineering of microelectronic fabrication / Stephen A. Campbell.
Material type:
TextSeries: Oxford series in electrical engineeringPublication details: New York : Oxford University Press, 1996.Description: xv, 536 p. : ill. ; 25 cmISBN: - 0195105087 (cl : acidfree paper)
- 621.38152/ 20 CAM
- TK7871.85 .C25 1996
| Cover image | Item type | Current library | Home library | Collection | Shelving location | Call number | Materials specified | Vol info | URL | Copy number | Status | Notes | Date due | Barcode | Item holds | Item hold queue priority | Course reserves | |
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| Books | SUN - Main Library General Shelves | Text Books | 621.38152/ CAM (Browse shelf(Opens below)) | Available | 2018-6941 |
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| 621.381/ MEA Foundations of electronics, circuits and devices / | 621.3810688/ LI Agent Systems in Electronic Business | 621.3815/ TOK Digital electronics / | 621.38152/ CAM The science and engineering of microelectronic fabrication / | 621.38152/ DEL Semi conductor | 621.38152/ THE Materials, integration and technology for monolithic instruments / | 621.381528/ PHI Motorola, Inc. ; Philips |
Includes bibliographical references and index.
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