Theil, Jeremy A. <br/><br/>
Materials, integration and technology for monolithic instruments /  symposium held March 29-30, 2005, San Francisco, California, USA / 
editors: Jeremy A. Theil ... [et al.]. 
 - Warrendale, Pa. :  Materials Research Society,  2005. 
 - ix, 171 p. :  ill. ;  24 cm. 
 - Materials Research Society symposium proceedings ;  v. 869 .
 - Materials Research Society symposia proceedings ;  v. 869 .
<br/><br/> "... papers from Symposium D, 'Materials, Integration and Technology for Monolithic Instruments,' held March 29-30 at the 2005 MRS Spring Meeting in San Francisco, California."--Pref. 
<br/><br/>Includes bibliographical references and indexes. 
<br/><br/><label>ISBN: </label>1558998233 
<br/><br/><label>LCCN: </label>2005284657 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction--Congresses.<br/>Integrated circuits--Ultra large scale integration--Design and construction--Congresses.<br/>Integrated circuits--Ultra large scale integration--Materials--Congresses.<br/>Thin films--Congresses.<br/>Metallic films--Congresses.<br/>Metallizing--Congresses.
<br/><br/><label>LC Class. No.: </label>TK7871.85  / .M367815 2005 
<br/><br/><label>Dewey Class. No.: </label>621.38152/  / THE