Microlithography : science and technology /
edited by James R. Sheats, Bruce W. Smith.
- New York : Marcel Dekker, c1998.
- xii, 780 p. : ill. ; 24 cm.
Includes bibliographical references and index.
0824799534 (alk. paper)
98016713
Microlithography--Industrial applications. Integrated circuits--Masks. Metal oxide semiconductors, Complementary--Design and construction. Manufacturing processes.