Campbell, Stephen A.,  1954- <br/><br/>
The science and engineering of microelectronic fabrication / 
Stephen A. Campbell. 
 - New York :  Oxford University Press,  1996. 
 - xv, 536 p. :  ill. ;  25 cm. 
 - Oxford series in electrical engineering .
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>0195105087 (cl : acidfree paper) 
<br/><br/><label>LCCN: </label>95035577  
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction.
<br/><br/><label>LC Class. No.: </label>TK7871.85  / .C25 1996 
<br/><br/><label>Dewey Class. No.: </label>621.38152/  / CAM