| 000 | 01270cam a2200313 a 4500 | ||
|---|---|---|---|
| 999 |
_c4785 _d4785 |
||
| 001 | 4506035 | ||
| 003 | SUN | ||
| 005 | 20180920152612.0 | ||
| 008 | 980316s1998 nyua b 001 0 eng | ||
| 010 | _a 98016713 | ||
| 020 | _a0824799534 (alk. paper) | ||
| 040 |
_aDLC _cSUNLIB _dDLC |
||
| 050 | 0 | 0 |
_aTK7836 _b.M525 1998 |
| 082 | 0 | 0 |
_a621.381531/ _221 _bSHE |
| 245 | 0 | 0 |
_aMicrolithography : _bscience and technology / _cedited by James R. Sheats, Bruce W. Smith. |
| 260 |
_aNew York : _bMarcel Dekker, _cc1998. |
||
| 300 |
_axii, 780 p. : _bill. ; _c24 cm. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aMicrolithography _xIndustrial applications. _912427 |
|
| 650 | 0 |
_aIntegrated circuits _xMasks. _912428 |
|
| 650 | 0 |
_aMetal oxide semiconductors, Complementary _xDesign and construction. _912429 |
|
| 650 | 0 |
_aManufacturing processes. _95078 |
|
| 700 | 1 |
_aSheats, James R., _d1948- _912430 |
|
| 700 | 1 |
_aSmith, Bruce W., _d1959- _912431 |
|
| 856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/enhancements/fy0647/98016713-d.html |
| 906 |
_a7 _bcbc _corignew _d1 _eocip _f19 _gy-gencatlg |
||
| 942 |
_2ddc _cBK |
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