| 000 | 01206cam a2200289 a 4500 | ||
|---|---|---|---|
| 999 |
_c5538 _d5538 |
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| 001 | 3034508 | ||
| 003 | SUN | ||
| 005 | 20181002160910.0 | ||
| 008 | 950719s1996 nyua b 001 0 eng | ||
| 010 | _a 95035577 | ||
| 020 | _a0195105087 (cl : acidfree paper) | ||
| 040 |
_aDLC _cSUNLIB _dDLC |
||
| 050 | 0 | 0 |
_aTK7871.85 _b.C25 1996 |
| 082 | 0 | 0 |
_a621.38152/ _220 _bCAM |
| 100 | 1 |
_aCampbell, Stephen A., _d1954- _915158 |
|
| 245 | 1 | 4 |
_aThe science and engineering of microelectronic fabrication / _cStephen A. Campbell. |
| 260 |
_aNew York : _bOxford University Press, _c1996. |
||
| 300 |
_axv, 536 p. : _bill. ; _c25 cm. |
||
| 440 | 0 |
_aOxford series in electrical engineering _915159 |
|
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aSemiconductors _xDesign and construction. _915160 |
|
| 856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/enhancements/fy0640/95035577-d.html |
| 856 | 4 | 1 |
_3Table of contents only _uhttp://www.loc.gov/catdir/enhancements/fy0640/95035577-t.html |
| 906 |
_a7 _bcbc _corignew _d1 _eocip _f19 _gy-gencatlg |
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| 942 |
_2ddc _cBK |
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