Microlithography :
Microlithography : science and technology /
edited by James R. Sheats, Bruce W. Smith.
- New York : Marcel Dekker, c1998.
- xii, 780 p. : ill. ; 24 cm.
Includes bibliographical references and index.
0824799534 (alk. paper)
98016713
Microlithography--Industrial applications.
Integrated circuits--Masks.
Metal oxide semiconductors, Complementary--Design and construction.
Manufacturing processes.
TK7836 / .M525 1998
621.381531/ / SHE
Includes bibliographical references and index.
0824799534 (alk. paper)
98016713
Microlithography--Industrial applications.
Integrated circuits--Masks.
Metal oxide semiconductors, Complementary--Design and construction.
Manufacturing processes.
TK7836 / .M525 1998
621.381531/ / SHE