Microlithography : (Record no. 4785)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01270cam a2200313 a 4500 |
| 001 - CONTROL NUMBER | |
| control field | 4506035 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | SUN |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20180920152612.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 980316s1998 nyua b 001 0 eng |
| 010 ## - LIBRARY OF CONGRESS CONTROL NUMBER | |
| LC control number | 98016713 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0824799534 (alk. paper) |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | DLC |
| Transcribing agency | SUNLIB |
| Modifying agency | DLC |
| 050 00 - LIBRARY OF CONGRESS CALL NUMBER | |
| Classification number | TK7836 |
| Item number | .M525 1998 |
| 082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.381531/ |
| Edition number | 21 |
| Item number | SHE |
| 245 00 - TITLE STATEMENT | |
| Title | Microlithography : |
| Remainder of title | science and technology / |
| Statement of responsibility, etc. | edited by James R. Sheats, Bruce W. Smith. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | New York : |
| Name of publisher, distributor, etc. | Marcel Dekker, |
| Date of publication, distribution, etc. | c1998. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xii, 780 p. : |
| Other physical details | ill. ; |
| Dimensions | 24 cm. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE | |
| Bibliography, etc. note | Includes bibliographical references and index. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Microlithography |
| General subdivision | Industrial applications. |
| 9 (RLIN) | 12427 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Integrated circuits |
| General subdivision | Masks. |
| 9 (RLIN) | 12428 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Metal oxide semiconductors, Complementary |
| General subdivision | Design and construction. |
| 9 (RLIN) | 12429 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Manufacturing processes. |
| 9 (RLIN) | 5078 |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Sheats, James R., |
| Dates associated with a name | 1948- |
| 9 (RLIN) | 12430 |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Smith, Bruce W., |
| Dates associated with a name | 1959- |
| 9 (RLIN) | 12431 |
| 856 42 - ELECTRONIC LOCATION AND ACCESS | |
| Materials specified | Publisher description |
| Uniform Resource Identifier | <a href="http://www.loc.gov/catdir/enhancements/fy0647/98016713-d.html">http://www.loc.gov/catdir/enhancements/fy0647/98016713-d.html</a> |
| 906 ## - LOCAL DATA ELEMENT F, LDF (RLIN) | |
| a | 7 |
| b | cbc |
| c | orignew |
| d | 1 |
| e | ocip |
| f | 19 |
| g | y-gencatlg |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Source of classification or shelving scheme | Dewey Decimal Classification |
| Koha item type | Books |
| Withdrawn status | Lost status | Source of classification or shelving scheme | Damaged status | Not for loan | Collection code | Home library | Current library | Shelving location | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Dewey Decimal Classification | Text Books | SUN - Main Library | SUN - Main Library | General Shelves | 09/20/2018 | 621.381531/ SHE | 2018-5984 | 09/20/2018 | 09/20/2018 | Books |