Normal view MARC view ISBD view

The science and engineering of microelectronic fabrication /

Campbell, Stephen A., 1954-

The science and engineering of microelectronic fabrication / Stephen A. Campbell. - New York : Oxford University Press, 1996. - xv, 536 p. : ill. ; 25 cm. - Oxford series in electrical engineering .

Includes bibliographical references and index.

ISBN: 0195105087 (cl : acidfree paper)

LCCN: 95035577

Subjects--Topical Terms:
Semiconductors--Design and construction.

LC Class. No.: TK7871.85 / .C25 1996

Dewey Class. No.: 621.38152/ / CAM

Place hold
Print
Request article
Add to your cart (remove)
Save record
BIBTEX Dublin Core MARCXML MARC (non-Unicode/MARC-8) MARC (Unicode/UTF-8) MARC (Unicode/UTF-8, Standard) MODS (XML) RIS ISBD
More searches

Search for this title in:
Other Libraries (WorldCat) Other Databases (Google Scholar) Online Stores (Bookfinder.com) Open Library (openlibrary.org)