Microlithography : science and technology / edited by James R. Sheats, Bruce W. Smith.

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Material type: Text

TextPublication details: New York : Marcel Dekker, c1998.Description: xii, 780 p. : ill. ; 24 cmISBN:

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Item type	Current library	Collection	Call number	Status	Date due	Barcode
Books	SUN - Main Library General Shelves	Text Books	621.381531/ SHE (Browse shelf(Opens below))	Available		2018-5984

Includes bibliographical references and index.

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