Microlithography : science and technology / edited by James R. Sheats, Bruce W. Smith.
Material type: TextPublication details: New York : Marcel Dekker, c1998.Description: xii, 780 p. : ill. ; 24 cmISBN:- 0824799534 (alk. paper)
- 621.381531/ 21 SHE
- TK7836 .M525 1998
Item type | Current library | Collection | Call number | Status | Date due | Barcode |
---|---|---|---|---|---|---|
Books | SUN - Main Library General Shelves | Text Books | 621.381531/ SHE (Browse shelf(Opens below)) | Available | 2018-5984 |
Includes bibliographical references and index.
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